RF Auto Match 500W/1000W

Min. Order: 1 Piece
Payment Terms: L/C, T/T
RF Auto Match 500W/1000W

Product Description

VENA series Auto RF Match is used into the vacuum thin film coating equipments for the processes such as plasma cleaning, plasma etching, magnetron sputtering, PECVD etc. The main function is to realize the auto matching function, and solves the technical vacancy.

Currently the domestic manufacturers mainly utilize the hand operated RF Match. And it is not so convenient to use the hand operated RF Match. Continuous operation is needed to adjust the impedance of the RF Match to achieve the process goal. While, the auto match can fill up the gap and owns the features of speediness, automatism, reliability, high efficiency, accuracy, saving labor and time. The optional RF systematic detection module can real time detect the system's forward power, reflect power, standing wave ratio, RF signal peak voltage, current, DC bias voltage. An in so doing it can make you detect and decrease the process variety. The products cover 500W, 1000W, 2000W.

Features and advantages:
Advantages Features
1\Reliability & stability for longtime
2\Real time reflect power test and control

3\Optimized design. Easy to install, use, and repair
4\broad range of matching, suitable for complicate load system
5\High efficiency in transmission
6\Low noise
7\Well shielding
8\Strict reliable test.
Model VENA-500 VENA-1000
Frequency 13.560MHz 13.560MHz
Out power 500w 1000w
Reflected power < 3w < 3w
Max load current 10ARMS 30ARMS
Max load voltage 4000VRMS 7000VRMS
Transmission efficiency > 90% > 94%
Load impedance 50Ω 50Ω
RF Input connector 50 Ω , UHF(or N-type), female 50 Ω , UHF(or N-type), female
Max plasma DC bias voltage 0 to 2.000 VDC 0 to 2.000 VDC
DC bias value 0~5VDC 0~5VDC
Matching time 3~5s 3~5s
Main coil 8 8
Main capacitor Air capacitor Vacuum cap.
Matching impedance range of real part 0~80Ω 0~80Ω
Matching impedance range of imaginary part -j200~~+j200 -j200~~+j100
RF input connector 50 Ω , UHF(or N-type)or customized 50 Ω , UHF(or N-type)or customized
Port and cooling way  
Control Port Auto/ Manual ctl port Auto/Manual ctrl window
Cooling method Forced cool air Forced cool air
Air velocity 48CFM 24CFM
Power supply  
AC power supply 220VAC 220VAC
AC frequency 50/60Hz 50/60Hz
Power supply power factor 90%(at peak power) 90%(at peak power)
Mechanical Feature  
Screw 6-32 6-32
Weight 5kg 5kg
Dimension 430mm(D)x220mm(W)x130mm(H), customization is welcome 430mm(D)x220mm(W)x130mm(H), or customized

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